Research
Title : | Effect of additives on germanium chemical mechanical planarization slurries |
Area of Research : | Chemical Sciences |
Focus Area : | Microelectronic Fabrication |
Principal Investigator : | Dr. R. Manivannan, Assistant Professor, National Institute of Technology (NIT), Raipur |
Contact info : | rmani.che@nitrr.ac.in |
Timeline Start Year : | 2016 |
Total Budget (INR): | 50,000 |
Details
Organizations involved
Implementing Agency : | National Institute of Technology (NIT), Raipur, Chhattisgarh Funding Agency :Institution of Engineers (India) | |