Research
Title : | Design and Development of Laser based Lithography System for MEMS and Semiconductor Device Fabrication |
Area of Research : | Physical Sciences, Engineering Sciences |
Focus Area : | Fabrication of MEMS and Semiconductor Devices |
Principal Investigator : | Dr H Muthurajan, Associate Professor, University of Mumbai, Maharashtra |
Contact info : | muthurajan@nano.mu.ac.in |
Timeline Start Year : | 2015 |
Timeline End Year : | 2017 |
Total Budget (INR): | 81,16,600 |
Details
Organizations involved
Implementing Agency : | University of Mumbai, Maharashtra Funding Agency :Department of Science and Technology (DST), Govt. of India | |