Executive Summary : | Mass spectrometer (MS) is an essential scientific tool for detecting and quantifying atomic/molecular samples, used in space exploration and deep space missions. The development of high-performance MS with low weight, form factor, and power consumption is a growing concern. Micro Electro Mechanical Systems (MEMS) technology is one enabling technology that can fabricate multiple devices in a single production run and integrate MEMS devices with associated electronics. This project proposes building a miniature MS for space applications, which can be augmented with suitable sample insertion techniques to create portable instruments for biomedical applications. The quadrupole mass spectrometer (QMS) is an instrument used as a science payload in several space missions. It consists of an ionizer, quadrupole mass filter (QMF), and detector, along with other ion optics elements. The QMS's simple electric potential dependent operation makes control easier than other MS techniques, making it ideal for spaceflight. The MEMS QMF has dimensions in the order of micro to millimeters, reducing physical and electrical requirements and allowing it to operate at higher pressure and relax the need for heavy vacuum pumps. Silicon on glass (SOG) MEMS technology will be used for fabrication of the MEMS QMF, with design studies being conducted to optimize performance parameters to meet the targeted resolution of 1amu. The primary objective is to fabricate and demonstrate the MEMS QMF using conventional electron impact ionizer and miniature Faraday cup detectors. A new approach of using Silicon Photo multiplier as an ion detector is also proposed. This is the first attempt by any research team in India to realize miniature MS using MEMS technology. |