Research
Title : | Development of two types of post etch residue strippers suitable for cleaning and removal of residues after plasma etching & photo resist ashing of metal & dielectric layers |
Area of Research : | Life Sciences & Biotechnology, Chemical Sciences |
Focus Area : | Residue strippers |
Principal Investigator : | Dr. Subrata Ghosh, Associate Professor, School of Basic Sciences, Indian Institute of Technology (IIT) Mandi, Himachal Pradesh |
Contact info : | subrata@iitmandi.ac.in |
Timeline Start Year : | 2018 |
Timeline End Year : | 2020 |
Total Budget (INR): | 39,00,000 |
Details
Organizations involved
Implementing Agency : | Institute of Technology (IIT) Mandi, Himachal Pradesh Funding Agency :Semi-Conductor Laboratory (SCL), Mohali | |